technology
Semiconductor Defect Review with PiFM
PiFM enables sub-10 nm semiconductor defect review with high-resolution spectrochemical imaging.
Review PiFM (photo-induced force microscopy) on the Vista 300 complements the existing Review SEM (scanning electron microscopy) analysis employed in automated defect review (ADR) by pairing non-destructive measurement with sub-5 nm resolution spectr... [9249 chars]
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